<?xml version="1.0" encoding="UTF-8" standalone="no"?>
<!-- Created with Inkscape (http://www.inkscape.org/) -->
<svg xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:cc="http://creativecommons.org/ns#" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:svg="http://www.w3.org/2000/svg" xmlns="http://www.w3.org/2000/svg" xmlns:sodipodi="http://sodipodi.sourceforge.net/DTD/sodipodi-0.dtd" xmlns:inkscape="http://www.inkscape.org/namespaces/inkscape" id="svg3336" version="1.1" inkscape:version="0.91 r13725" width="572.86133" height="205.69531" viewBox="0 0 572.86133 205.69531" sodipodi:docname="Microbolometer.svg">
  <metadata id="metadata3342">
    <rdf:RDF>
      <cc:Work rdf:about="">
        <dc:format>image/svg+xml</dc:format>
        <dc:type rdf:resource="http://purl.org/dc/dcmitype/StillImage"/>
        <dc:title/>
      </cc:Work>
    </rdf:RDF>
  </metadata>
  <defs id="defs3340">
    <marker inkscape:stockid="Arrow2Mend" orient="auto" refY="0" refX="0" id="marker5096" style="overflow:visible" inkscape:isstock="true">
      <path id="path5098" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" transform="scale(-0.6,-0.6)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:isstock="true" style="overflow:visible" id="marker5012" refX="0" refY="0" orient="auto" inkscape:stockid="Arrow2Mend" inkscape:collect="always">
      <path transform="scale(-0.6,-0.6)" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" id="path5014" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="Arrow2Mend" orient="auto" refY="0" refX="0" id="marker4934" style="overflow:visible" inkscape:isstock="true" inkscape:collect="always">
      <path id="path4936" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" transform="scale(-0.6,-0.6)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:isstock="true" style="overflow:visible" id="marker4856" refX="0" refY="0" orient="auto" inkscape:stockid="Arrow2Mend" inkscape:collect="always">
      <path transform="scale(-0.6,-0.6)" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" id="path4858" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:isstock="true" style="overflow:visible" id="marker4792" refX="0" refY="0" orient="auto" inkscape:stockid="Arrow2Mstart">
      <path transform="scale(0.6,0.6)" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" style="fill:#ff00ff;fill-opacity:0.39336494;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" id="path4794" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="Arrow2Mend" orient="auto" refY="0" refX="0" id="Arrow2Mend" style="overflow:visible" inkscape:isstock="true" inkscape:collect="always">
      <path id="path4217" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" transform="scale(-0.6,-0.6)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="Arrow2Mstart" orient="auto" refY="0" refX="0" id="Arrow2Mstart" style="overflow:visible" inkscape:isstock="true" inkscape:collect="always">
      <path id="path4214" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" transform="scale(0.6,0.6)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="TriangleOutL" orient="auto" refY="0" refX="0" id="TriangleOutL" style="overflow:visible" inkscape:isstock="true">
      <path id="path4332" d="m 5.77,0 -8.65,5 0,-10 8.65,5 z" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1pt;stroke-opacity:1" transform="scale(0.8,0.8)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="TriangleInL" orient="auto" refY="0" refX="0" id="TriangleInL" style="overflow:visible" inkscape:isstock="true">
      <path id="path4323" d="m 5.77,0 -8.65,5 0,-10 8.65,5 z" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1pt;stroke-opacity:1" transform="scale(-0.8,-0.8)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="Arrow2Lstart" orient="auto" refY="0" refX="0" id="Arrow2Lstart" style="overflow:visible" inkscape:isstock="true">
      <path id="path4208" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:0.625;stroke-linejoin:round;stroke-opacity:1" d="M 8.7185878,4.0337352 -2.2072895,0.01601326 8.7185884,-4.0017078 c -1.7454984,2.3720609 -1.7354408,5.6174519 -6e-7,8.035443 z" transform="matrix(1.1,0,0,1.1,1.1,0)" inkscape:connector-curvature="0"/>
    </marker>
    <marker inkscape:stockid="Arrow1Lstart" orient="auto" refY="0" refX="0" id="Arrow1Lstart" style="overflow:visible" inkscape:isstock="true">
      <path id="path4190" d="M 0,0 5,-5 -12.5,0 5,5 0,0 Z" style="fill:#000000;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1pt;stroke-opacity:1" transform="matrix(0.8,0,0,0.8,10,0)" inkscape:connector-curvature="0"/>
    </marker>
  </defs>
  <sodipodi:namedview pagecolor="#ffffff" bordercolor="#666666" borderopacity="1" objecttolerance="10" gridtolerance="10" guidetolerance="10" inkscape:pageopacity="0" inkscape:pageshadow="2" inkscape:window-width="1280" inkscape:window-height="961" id="namedview3338" showgrid="false" inkscape:object-paths="true" inkscape:object-nodes="false" inkscape:snap-grids="true" inkscape:snap-intersection-paths="false" inkscape:zoom="1" inkscape:cx="318.23318" inkscape:cy="79.974104" inkscape:window-x="1272" inkscape:window-y="-8" inkscape:window-maximized="1" inkscape:current-layer="svg3336" fit-margin-top="0" fit-margin-left="0" fit-margin-right="0" fit-margin-bottom="0" inkscape:snap-bbox="true" inkscape:bbox-paths="true">
    <inkscape:grid type="xygrid" id="grid4160" originx="78.896484" originy="335.49999"/>
  </sodipodi:namedview>
  <g inkscape:groupmode="layer" id="layer2" inkscape:label="Vektor" style="display:inline" transform="translate(78.896484,-356.67969)"/>
  <rect style="opacity:1;fill:#72e1ff;fill-opacity:1;stroke:#000000;stroke-width:1;stroke-miterlimit:4;stroke-dasharray:none;stroke-dashoffset:0;stroke-opacity:1" id="rect4166" width="320" height="64.999992" x="108.89648" y="140.19531"/>
  <path style="fill:#7dc801;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" d="m 108.89648,140.19531 0,-10 50,0 0,10 z" id="path4168" inkscape:connector-curvature="0"/>
  <path style="fill:#fa483f;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" d="m 158.89648,55.195312 220,0 0,15 -220,0 z" id="path4174" inkscape:connector-curvature="0"/>
  <path style="fill:#7dc801;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" d="m 378.89648,130.19531 0,10 50,0 0,-10 z" id="path4180" inkscape:connector-curvature="0"/>
  <path style="fill:#ff77ff;fill-opacity:1;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" d="m 183.89648,140.19531 0,-15 165,0 0,15 z" id="path4182" inkscape:connector-curvature="0"/>
  <path style="fill:none;fill-rule:evenodd;stroke:#000000;stroke-width:1;stroke-linecap:butt;stroke-linejoin:miter;stroke-miterlimit:4;stroke-dasharray:none;stroke-opacity:1;marker-start:url(#Arrow2Mstart);marker-end:url(#Arrow2Mend)" d="m 358.89648,70.195312 0,69.999998" id="path4184" inkscape:connector-curvature="0"/>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" x="296.27148" y="103.82031" id="text4764-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan4766-de" x="296.27148" y="103.82031">2 µm</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" x="296.27148" y="103.82031" id="text4764" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan4766" x="296.27148" y="103.82031">2μm</svg:tspan></svg:text></svg:switch>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ff77ff;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ff77ff;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="-1.1035156" y="45.195313" id="text4768-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan4770-de" x="-1.1035156" y="45.195313">Reflektor</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ff77ff;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="-1.1035156" y="45.195313" id="text4768" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan4770" x="-1.1035156" y="45.195313">reflector</svg:tspan></svg:text></svg:switch>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#7dc801;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#7dc801;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="-1.1035156" y="105.19531" id="text4772-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan4774-de" x="-1.1035156" y="105.19531">Elektrode</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#7dc801;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="-1.1035156" y="105.19531" id="text4772" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan4774" x="-1.1035156" y="105.19531">electrode</svg:tspan></svg:text></svg:switch>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#fa4840;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#fa4840;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="358.89648" y="15.195313" id="text4776-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan4778-de" x="358.89648" y="15.195313">IR-absor. Material</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#fa4840;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="358.89648" y="15.195313" id="text4776" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan4778" x="358.89648" y="15.195313">IR absorbing material</svg:tspan></svg:text></svg:switch>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ecef01;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ecef01;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="448.89648" y="80.195313" id="text4780-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan4782-de" x="448.89648" y="80.195313">Goldkontakt</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#ecef01;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;" x="448.89648" y="80.195313" id="text4780" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan4782" x="448.89648" y="80.195313">gold contact</svg:tspan></svg:text></svg:switch>
  <path style="fill:none;fill-opacity:0.39336494;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;marker-end:url(#marker4856)" d="m 438.89648,70.195312 -45,-5" id="path4784" inkscape:connector-curvature="0"/>
  <path style="fill:none;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;marker-end:url(#marker4934)" d="m 348.89648,15.195312 -45,30" id="path4926" inkscape:connector-curvature="0"/>
  <path style="fill:none;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;marker-end:url(#marker5096)" d="m 93.896484,100.19531 29.999996,25" id="path5088" inkscape:connector-curvature="0"/>
  <svg:switch style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1"><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" x="109.89648" y="179.19531" id="text5178-de" sodipodi:linespacing="125%" systemLanguage="de"><svg:tspan sodipodi:role="line" id="tspan5180-de" x="109.89648" y="179.19531">Ausleseschaltkreis / Si-Substrat</svg:tspan></svg:text><svg:text xml:space="preserve" style="font-style:normal;font-weight:normal;font-size:20px;line-height:125%;font-family:sans-serif;letter-spacing:0px;word-spacing:0px;fill:#000000;fill-opacity:1;stroke:none;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1" x="109.89648" y="179.19531" id="text5178" sodipodi:linespacing="125%"><svg:tspan sodipodi:role="line" id="tspan5180" x="109.89648" y="179.19531">readout circuit/silicon substrate</svg:tspan></svg:text></svg:switch>
  <path style="fill:#7dc801;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;fill-opacity:1" d="m 378.89648,130.19532 10,0 0,-60.000002 -10,0 z" id="path5182" inkscape:connector-curvature="0"/>
  <path style="fill:#ebef01;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;fill-opacity:1" d="m 378.89648,70.195318 10,0 0,-15 -10,0 z" id="path5184" inkscape:connector-curvature="0"/>
  <path style="fill:#7dc801;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;fill-opacity:1" d="m 158.89648,130.19532 -10,0 0,-60.000002 10,0 z" id="path5186" inkscape:connector-curvature="0"/>
  <path style="fill:#ebef01;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;fill-opacity:1" d="m 158.89648,70.195318 -10,0 0,-15 10,0 z" id="path5188" inkscape:connector-curvature="0"/>
  <path style="fill:none;fill-rule:evenodd;stroke:#000000;stroke-width:1px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;marker-end:url(#marker5012)" d="M 83.896484,45.195312 188.89648,115.19531" id="path5004" inkscape:connector-curvature="0"/>
</svg>
